TY  - BOOK
AU  - Middleman S.
AU  - Hochberg Arthur K.
TI  - Process Engineering Analysis in Semiconductor Device
SN  - 9780071127448
SN  - 2832
U1  - 621.38152           
PY  - 1993///
CY  - New York
PB  - McGrawHill
KW  - Semiconductors621.38152
ER  -