TY  - BOOK
AU  - Edi: Motamedi Manouchehr, E.
TI  - MOEMS :  Micro-Opto-Electro-Mechanical Systems
SN  - 9788122428339
SN  - 9931
U1  - 621.381             
PY  - 2010///
CY  - New Delhi
PB  - New Age International (P) Limited Publishers
KW  - Electronics engineering621.381
ER  -